http://www.rssboard.org/rss-specification 720 Recent lma items https://escholarship.org/uc/lma/rss Recent eScholarship items from Laboratory for Manufacturing and Sustainability Fri, 15 May 2026 12:19:55 +0000 Impact of the manufacturing phase on the life cycle of machined products https://escholarship.org/uc/item/5rs7n92f Impact of the manufacturing phase on the life cycle of machined products https://escholarship.org/uc/item/5rs7n92f Tue, 19 Aug 2014 00:00:00 +0000 Diaz, Nancy Helu, Moneer Ninomiya, Kevin Dornfeld, David Micromachining and Burr Formation for Precision Mechanical Components https://escholarship.org/uc/item/2jv2x7wn Micromachining and Burr Formation for Precision Mechanical Components https://escholarship.org/uc/item/2jv2x7wn Tue, 19 Aug 2014 00:00:00 +0000 Hartnett, J. Min, S. Dornfeld, D. A Usability Assessment of the Engineering Pathway Educational Digital Library  https://escholarship.org/uc/item/84k4034s A Usability Assessment of the Engineering Pathway Educational Digital Library  https://escholarship.org/uc/item/84k4034s Wed, 13 Aug 2014 00:00:00 +0000 Robinson, Stefanie L. Environmental Impact Characterization of Milling and Implications for Potential Energy Savings in Industry https://escholarship.org/uc/item/8xg6g8xt Environmental Impact Characterization of Milling and Implications for Potential Energy Savings in Industry https://escholarship.org/uc/item/8xg6g8xt Tue, 29 Jul 2014 00:00:00 +0000 Diaz, Nancy Ninomiya, Kevin Noble, Joanna Dornfeld, David Quantifying the Improvements in Rapid Prototyping and Product Life Cycle Performance Created by Machining https://escholarship.org/uc/item/5fj0343s Quantifying the Improvements in Rapid Prototyping and Product Life Cycle Performance Created by Machining https://escholarship.org/uc/item/5fj0343s Tue, 29 Jul 2014 00:00:00 +0000 Helu, Moneer Noble, Joanna McKinstry, Katherine Hoople, Gordon Rolfe, David Berthold, Dennis Ninomiya, Kevin Dornfeld, David Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/4cq8c54b Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/4cq8c54b Tue, 29 Jul 2014 00:00:00 +0000 Dornfeld, David Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/0hz9v950 Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/0hz9v950 Tue, 29 Jul 2014 00:00:00 +0000 Hartnett, Jeffrey Min, Sangkee Dornfeld, David Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/0ht5666c Micromachining and Burr Formation for Precision Components https://escholarship.org/uc/item/0ht5666c Tue, 29 Jul 2014 00:00:00 +0000 Hartnett, Jeffrey Min, Sangkee Dornfeld, David Review of the Impacts of Crumb Rubber in Artificial Turf Applications https://escholarship.org/uc/item/9zp430wp Review of the Impacts of Crumb Rubber in Artificial Turf Applications https://escholarship.org/uc/item/9zp430wp Wed, 16 Jul 2014 00:00:00 +0000 Simon, Rachel Evaluating the End-of-Life Phase of Consumer Electronics:Methods and Tools to Improve Product Design and Material Recovery https://escholarship.org/uc/item/9tj3t93z Evaluating the End-of-Life Phase of Consumer Electronics:Methods and Tools to Improve Product Design and Material Recovery https://escholarship.org/uc/item/9tj3t93z Wed, 16 Jul 2014 00:00:00 +0000 Mangold, Jennifer Ann ImpactMap: Designing Sustainable Supply Chains by Incorporating Data Uncertainty https://escholarship.org/uc/item/9399w8zf ImpactMap: Designing Sustainable Supply Chains by Incorporating Data Uncertainty https://escholarship.org/uc/item/9399w8zf Wed, 16 Jul 2014 00:00:00 +0000 Fuge, Mark McKinstry, Katherine Ninomiya, Kevin Understanding Life Cycle Social Impacts in Manufacturing: A processed-based approach https://escholarship.org/uc/item/84z0z75t Understanding Life Cycle Social Impacts in Manufacturing: A processed-based approach https://escholarship.org/uc/item/84z0z75t Wed, 16 Jul 2014 00:00:00 +0000 Hutchins, Margot J. Robinson, Stefanie L. Dornfeld, David Implementing Engineering and Sustainability Curriculum in K-12 Education https://escholarship.org/uc/item/75x445xn Implementing Engineering and Sustainability Curriculum in K-12 Education https://escholarship.org/uc/item/75x445xn Wed, 16 Jul 2014 00:00:00 +0000 Robinson, Stefanie L. Mangold, Jennifer A. Packaging and the Supply Chain: A Look at Transportation https://escholarship.org/uc/item/6z21f6tn Packaging and the Supply Chain: A Look at Transportation https://escholarship.org/uc/item/6z21f6tn Wed, 16 Jul 2014 00:00:00 +0000 Simon, Rachel Chen, Yifen Wireless Sensor Networks for Home Health Care https://escholarship.org/uc/item/66s822jk Wireless Sensor Networks for Home Health Care https://escholarship.org/uc/item/66s822jk Wed, 16 Jul 2014 00:00:00 +0000 Baker, Chris R. Armijo, Kenneth Belka, Simon Benhabib, Merwan Bhargava, Vikas Burkhart, Nathan Minassians, Artin D. Dervisoglu, Gunes Gutnik, Lilia Haick, M. B. Ho, Christine Koplow, Mike Mangold, Jennifer Robinson, Stefanie Rosa, Matt Schwartz, Miclas Sims, Christo Stoffregen, Hanns Waterbury, Andrew Leland, Eli S. Pering, Trevor Wright, Paul K. Framework for Modeling the Uncertainty of Future Events in Life Cycle Assessment https://escholarship.org/uc/item/5g43f9kv Framework for Modeling the Uncertainty of Future Events in Life Cycle Assessment https://escholarship.org/uc/item/5g43f9kv Wed, 16 Jul 2014 00:00:00 +0000 Chen, Yi-Fen Simon, Rachel Dornfeld, David Total cost analysis of process time reduction as a green machining strategy https://escholarship.org/uc/item/5b6395c6 Total cost analysis of process time reduction as a green machining strategy https://escholarship.org/uc/item/5b6395c6 Wed, 16 Jul 2014 00:00:00 +0000 Helu, Moneer Behmann, Benjamin Meier, Harald Dornfeld, David Lanza, Gisela Schulze, Volker Environmental Assessment of Information Technology Products Using a Triage Approach https://escholarship.org/uc/item/4q51z64m Environmental Assessment of Information Technology Products Using a Triage Approach https://escholarship.org/uc/item/4q51z64m Wed, 16 Jul 2014 00:00:00 +0000 Zgola, Melissa L. Olivetti, Elsa A. Weber, Christopher Boyd, Sarah Mangold, Jennifer Abedrabbo, Ramzy Williams, Eric Gregory, Jeremy Kirchain, Randolph E. Knowledge-Based Evolutionary Linkage in MEMS Design Synthesis https://escholarship.org/uc/item/3nt1r0zh Knowledge-Based Evolutionary Linkage in MEMS Design Synthesis https://escholarship.org/uc/item/3nt1r0zh Wed, 16 Jul 2014 00:00:00 +0000 Cobb, Corie L. Zhang, Ying Agogino, Alice M. Mangold, Jennifer Impact of green machining strategies on achieved surface quality https://escholarship.org/uc/item/3634529v Impact of green machining strategies on achieved surface quality https://escholarship.org/uc/item/3634529v Wed, 16 Jul 2014 00:00:00 +0000 Helu, Moneer Behmann, Benjamin Meier, Harald Dornfeld, David Lanza, Gisela Schulze, Volker Mapping the Life Cycle Analysis and Sustainability Impact of Design for Environment Principles https://escholarship.org/uc/item/2mv6d6h6 Mapping the Life Cycle Analysis and Sustainability Impact of Design for Environment Principles https://escholarship.org/uc/item/2mv6d6h6 Wed, 16 Jul 2014 00:00:00 +0000 Oehlberg, Lora Bayley, Cindy Hartman, Cole Agogino, Alice An Environmental and Economic Trade-off Analysis of Manufacturing Process Chains to Inform Decision Making for Sustainability https://escholarship.org/uc/item/26q3w4bc An Environmental and Economic Trade-off Analysis of Manufacturing Process Chains to Inform Decision Making for Sustainability https://escholarship.org/uc/item/26q3w4bc Wed, 16 Jul 2014 00:00:00 +0000 Robinson, Stefanie L. On the Shrinkage and Stiffening of a Cellulose Sponge upon Drying https://escholarship.org/uc/item/12b238cd On the Shrinkage and Stiffening of a Cellulose Sponge upon Drying https://escholarship.org/uc/item/12b238cd Wed, 16 Jul 2014 00:00:00 +0000 Rey, Justine Vandamme, Matthieu Comparing Environmental Impacts of Additive Manufacturing vs. Traditional Machining via Life-Cycle Assessment https://escholarship.org/uc/item/0gv882qk Comparing Environmental Impacts of Additive Manufacturing vs. Traditional Machining via Life-Cycle Assessment https://escholarship.org/uc/item/0gv882qk Wed, 16 Jul 2014 00:00:00 +0000 Faludi, Jeremy Bayley, Cindy Bhogal, Suraj Iribarne, Myles Case-Based Reasoning and Object-Oriented Data Structures Exploit Biological Analogs to Generate Virtual Evolutionary Linkages https://escholarship.org/uc/item/8q94q7hv Case-Based Reasoning and Object-Oriented Data Structures Exploit Biological Analogs to Generate Virtual Evolutionary Linkages https://escholarship.org/uc/item/8q94q7hv Tue, 15 Jul 2014 00:00:00 +0000 Cobb, Corie L. Zhang, Ying Agogino, Alice M. Mangold, Jennifer The engineering design process as a problem solving and learning tool in K-12 classrooms https://escholarship.org/uc/item/8390918m The engineering design process as a problem solving and learning tool in K-12 classrooms https://escholarship.org/uc/item/8390918m Tue, 15 Jul 2014 00:00:00 +0000 Mangold, Jennifer Robinson, Stefanie Manufacturing — Its Evolution and Future https://escholarship.org/uc/item/6mk263q6 Manufacturing — Its Evolution and Future https://escholarship.org/uc/item/6mk263q6 Tue, 15 Jul 2014 00:00:00 +0000 Merchant, Eugene M. Wright, Paul K. Dornfeld, David Precision Manufacturing Process Monitoring with Acoustic Emission https://escholarship.org/uc/item/647722kf Precision Manufacturing Process Monitoring with Acoustic Emission https://escholarship.org/uc/item/647722kf Tue, 15 Jul 2014 00:00:00 +0000 Lee, D. E. Hwang, I. Valente, C. M. O. Oliviera, J. F.G. Dornfeld, D. A. Experimental and numerical investigation of the kinematic theory of unsteady separation https://escholarship.org/uc/item/62f7c813 Experimental and numerical investigation of the kinematic theory of unsteady separation https://escholarship.org/uc/item/62f7c813 Tue, 15 Jul 2014 00:00:00 +0000 Weldon, M. Peacock, T. Jacobs, G. B. Helu, M. Haller, G. Precision and Energy Usage for Additive Manufacturing https://escholarship.org/uc/item/4c11k74w Precision and Energy Usage for Additive Manufacturing https://escholarship.org/uc/item/4c11k74w Tue, 15 Jul 2014 00:00:00 +0000 Clemon, Lee Sudradjat, Anton Jaquez, Maribel Krishna, Aditya Rammah, Marwan Dornfeld, David Research on Subwavelength Microphtonic Sensors for In-situ Monitoring with High Spatial and Temporal Resolution in Manufacturing Environments https://escholarship.org/uc/item/23g8r7g6 Research on Subwavelength Microphtonic Sensors for In-situ Monitoring with High Spatial and Temporal Resolution in Manufacturing Environments https://escholarship.org/uc/item/23g8r7g6 Tue, 15 Jul 2014 00:00:00 +0000 Li, Xiaochun Wong, Chee Wei Dornfeld, David Thomas, Brian A Study of Surface Roughness in the Micro-End-Milling Process https://escholarship.org/uc/item/1bc7g9kj A Study of Surface Roughness in the Micro-End-Milling Process https://escholarship.org/uc/item/1bc7g9kj Tue, 15 Jul 2014 00:00:00 +0000 Lee, Kiha Dornfeld, David A. Strategies for Minimum Energy Operation for Precision Machining https://escholarship.org/uc/item/1821r8f2 Strategies for Minimum Energy Operation for Precision Machining https://escholarship.org/uc/item/1821r8f2 Tue, 15 Jul 2014 00:00:00 +0000 Diaz, Nancy Helu, Moneer Jarvis, Andrew Tonissen, Stefan Dornfeld, David Schlosser, Ralf Assessment of Lean and Green Strategies by Simulation of Manufacturing Systems in Discrete Production Environments https://escholarship.org/uc/item/9w13b4dr Assessment of Lean and Green Strategies by Simulation of Manufacturing Systems in Discrete Production Environments https://escholarship.org/uc/item/9w13b4dr Thu, 10 Jul 2014 00:00:00 +0000 Diaz-Elsayed, Nancy Jondral, Annabel Greinacher, Sebastian Dornfeld, David Lanza, Gisela Dispenser printing for prototyping microscale devices https://escholarship.org/uc/item/9pz403mt Dispenser printing for prototyping microscale devices https://escholarship.org/uc/item/9pz403mt Thu, 10 Jul 2014 00:00:00 +0000 Wright, Paul K. Dornfeld, David A. Chen, Alic Ho, Christine C. Evans, James W. Semi-empirical material removal rate distribution model for SiO<sub>2</sub> chemical mechanical polishing (CMP) processes https://escholarship.org/uc/item/9nr6b6jr Semi-empirical material removal rate distribution model for SiO<sub>2</sub> chemical mechanical polishing (CMP) processes https://escholarship.org/uc/item/9nr6b6jr Thu, 10 Jul 2014 00:00:00 +0000 Lee, H. S. Jeong, H. D. Dornfeld, D. A. Particle-Scale Modeling of CMP https://escholarship.org/uc/item/9hz9d21f Particle-Scale Modeling of CMP https://escholarship.org/uc/item/9hz9d21f Thu, 10 Jul 2014 00:00:00 +0000 Talbot, Jan B. Doyle, Fiona M. Dornfeld, David A. Strategies for Burr Minimization and Cleanability in Aerospace and Automotive Manufacturing https://escholarship.org/uc/item/8s3507d0 Strategies for Burr Minimization and Cleanability in Aerospace and Automotive Manufacturing https://escholarship.org/uc/item/8s3507d0 Thu, 10 Jul 2014 00:00:00 +0000 Ávila, Miguel C. Gardner, Joel D. Reich-Weiser, Corinne Vijayaraghavan, Athulan Dornfeld, David Formulation of the Chip Cleanability Mechanics from fluid transport https://escholarship.org/uc/item/8cp4q3vs Formulation of the Chip Cleanability Mechanics from fluid transport https://escholarship.org/uc/item/8cp4q3vs Thu, 10 Jul 2014 00:00:00 +0000 Garg, Saurabh Dornfeld, David Berger, K. Quantifying the Environmental Footprint of Semiconductor Equipment using the Environmental Value Systems Analysis (EnV-S) https://escholarship.org/uc/item/84c49635 Quantifying the Environmental Footprint of Semiconductor Equipment using the Environmental Value Systems Analysis (EnV-S) https://escholarship.org/uc/item/84c49635 Thu, 10 Jul 2014 00:00:00 +0000 Krishnan, Nikhil Raoux, Sebastién Dornfeld, David A Review of Engineering Research in Sustainable Manufacturing https://escholarship.org/uc/item/8260n3t5 A Review of Engineering Research in Sustainable Manufacturing https://escholarship.org/uc/item/8260n3t5 Thu, 10 Jul 2014 00:00:00 +0000 Haapala, Karl R. Zhao, Fu Camelio, Jaime Sutherland, John W. Skerlos, Steven J. Dornfeld, David A. Jawahir, I. S. Clarens, Andres F. Rickli, Jeremy L. Interoperability Standards for Machine Tool Performance Monitoring https://escholarship.org/uc/item/7xp0m1x5 Interoperability Standards for Machine Tool Performance Monitoring https://escholarship.org/uc/item/7xp0m1x5 Thu, 10 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David Using a Hybrid Approach to Evaluate Semiconductor Life Cycle Environmental Issues: A Case Study in Interconnect Module Impacts https://escholarship.org/uc/item/7x99h868 Using a Hybrid Approach to Evaluate Semiconductor Life Cycle Environmental Issues: A Case Study in Interconnect Module Impacts https://escholarship.org/uc/item/7x99h868 Thu, 10 Jul 2014 00:00:00 +0000 Krishnan, N. Boyd, S. Rosales, J. Dornfeld, D. Raoux, S. Smati, R. Higher Competitiveness of Speed-Stroke Grinding by Using Increased Wheel Speeds https://escholarship.org/uc/item/7sx9x437 Higher Competitiveness of Speed-Stroke Grinding by Using Increased Wheel Speeds https://escholarship.org/uc/item/7sx9x437 Thu, 10 Jul 2014 00:00:00 +0000 Duscha, M. Linke, B. Klocke, F. Dornfeld, D. Sustainability Indicators for Discrete Manufacturing Processes Applied to Grinding Technology https://escholarship.org/uc/item/7fw982mb Sustainability Indicators for Discrete Manufacturing Processes Applied to Grinding Technology https://escholarship.org/uc/item/7fw982mb Thu, 10 Jul 2014 00:00:00 +0000 Linke, Barbara S. Corman, Gero J. Dornfeld, David A. Tönissen, Stefan Cost and Energy Consumption Optimization of Product Manufacture in a Flexible Manufacturing System https://escholarship.org/uc/item/7dw7w6vc Cost and Energy Consumption Optimization of Product Manufacture in a Flexible Manufacturing System https://escholarship.org/uc/item/7dw7w6vc Thu, 10 Jul 2014 00:00:00 +0000 Diaz, Nancy Dornfeld, David Condition Monitoring in End-Milling Using Wireless Sensor Networks (WSNs) https://escholarship.org/uc/item/7cp1p0ww Condition Monitoring in End-Milling Using Wireless Sensor Networks (WSNs) https://escholarship.org/uc/item/7cp1p0ww Thu, 10 Jul 2014 00:00:00 +0000 Wright, Paul Dornfeld, David Ota, Nathan Acoustic emission based tool contact detection for ultra-precision machining https://escholarship.org/uc/item/7br9q19x Acoustic emission based tool contact detection for ultra-precision machining https://escholarship.org/uc/item/7br9q19x Thu, 10 Jul 2014 00:00:00 +0000 Min, S. Lidde, J. Raue, N. Dornfeld, D. Bicepstrum Based Blind Identification of the Acoustic Emission (AE) Signal in Precision Turning https://escholarship.org/uc/item/77m140sk Bicepstrum Based Blind Identification of the Acoustic Emission (AE) Signal in Precision Turning https://escholarship.org/uc/item/77m140sk Thu, 10 Jul 2014 00:00:00 +0000 Iturrospe, Aitzol Dornfeld, David Atxa, Vicente Abete, José M. Procedural Design of Imprint Rolls for Fluid Pathway Fabrication https://escholarship.org/uc/item/74d0t9cx Procedural Design of Imprint Rolls for Fluid Pathway Fabrication https://escholarship.org/uc/item/74d0t9cx Thu, 10 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David Linking tool paths generated with different offset distances for edge quality enhancement in planar milling https://escholarship.org/uc/item/72714099 Linking tool paths generated with different offset distances for edge quality enhancement in planar milling https://escholarship.org/uc/item/72714099 Thu, 10 Jul 2014 00:00:00 +0000 Chu, C-H Dornfeld, D Trajectory Generation in High-Speed, High-Precision Micromilling using Subdivision Surfaces https://escholarship.org/uc/item/6m30820n Trajectory Generation in High-Speed, High-Precision Micromilling using Subdivision Surfaces https://escholarship.org/uc/item/6m30820n Thu, 10 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Sodemann, Angela Hoover, Aaron Mayor, Rhett J. Dornfeld, David Semi-empirical Modeling of the Energy Consumed during the Injection Molding Process https://escholarship.org/uc/item/6j39z8nj Semi-empirical Modeling of the Energy Consumed during the Injection Molding Process https://escholarship.org/uc/item/6j39z8nj Thu, 10 Jul 2014 00:00:00 +0000 Chien, Joshua M. Dornfeld, David Towards Energy and Resource Efficient Manufacturing: A Processes and Systems Approach https://escholarship.org/uc/item/6bd3c6bw Towards Energy and Resource Efficient Manufacturing: A Processes and Systems Approach https://escholarship.org/uc/item/6bd3c6bw Thu, 10 Jul 2014 00:00:00 +0000 Duflou, Joost R. Sutherland, John W. Dornfeld, David Herrmann, Christoph Jeswiet, Jack Kara, Sami Hauschild, Michael Kellens, Karel Schematic Characterization of Human Health Impact of Toxic Chemicals for Sustainable Design and Manufacturing https://escholarship.org/uc/item/4nc5051z Schematic Characterization of Human Health Impact of Toxic Chemicals for Sustainable Design and Manufacturing https://escholarship.org/uc/item/4nc5051z Thu, 10 Jul 2014 00:00:00 +0000 Yuan, Chris Y. Dornfeld, David Micromachining for the Precision Fabrication of Microfluidic Devices https://escholarship.org/uc/item/4jn4v4f0 Micromachining for the Precision Fabrication of Microfluidic Devices https://escholarship.org/uc/item/4jn4v4f0 Thu, 10 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Hartnett, Jeffrey Dornfeld, David Prediction of Burr Formation during Face Milling Using an Artificial Neural Network with Optimized Cutting Conditions https://escholarship.org/uc/item/4037n2wd Prediction of Burr Formation during Face Milling Using an Artificial Neural Network with Optimized Cutting Conditions https://escholarship.org/uc/item/4037n2wd Thu, 10 Jul 2014 00:00:00 +0000 Lee, S H Dornfeld, D A Challenges in modeling machining in multilayer materials https://escholarship.org/uc/item/3tb38390 Challenges in modeling machining in multilayer materials https://escholarship.org/uc/item/3tb38390 Thu, 10 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David A. Software support for environmentally benign mold making process and operations https://escholarship.org/uc/item/3r59k11j Software support for environmentally benign mold making process and operations https://escholarship.org/uc/item/3r59k11j Thu, 10 Jul 2014 00:00:00 +0000 Kong, Daeyoung Choi, Seungchoun Dornfeld, David Modification of surface properties on a nitride based coating films through mirror-quality finish grinding https://escholarship.org/uc/item/3781q4c6 Modification of surface properties on a nitride based coating films through mirror-quality finish grinding https://escholarship.org/uc/item/3781q4c6 Thu, 10 Jul 2014 00:00:00 +0000 Katahira, K. Ohmori, H. Komotori, J. Dornfeld, D. Kotani, H. Mizutani, M. Life-Cycle Energy Demand of Computational Logic: From High-Performance 32nm CPU to Ultra-Low-Power 130nm MCU https://escholarship.org/uc/item/2d47b7dg Life-Cycle Energy Demand of Computational Logic: From High-Performance 32nm CPU to Ultra-Low-Power 130nm MCU https://escholarship.org/uc/item/2d47b7dg Thu, 10 Jul 2014 00:00:00 +0000 Bol, David Boyd, Sarah Dornfeld, David A Three Dimensional System Approach for Environmentally Sustainable Manufacturing https://escholarship.org/uc/item/262749ph A Three Dimensional System Approach for Environmentally Sustainable Manufacturing https://escholarship.org/uc/item/262749ph Thu, 10 Jul 2014 00:00:00 +0000 Yuan, Chris Zhai, Qiang Dornfield, David Effects of ELID-Electrolytic Coolant with Nanometer Size Carbon Particles on the Cutting Phenomena https://escholarship.org/uc/item/24b6n91g Effects of ELID-Electrolytic Coolant with Nanometer Size Carbon Particles on the Cutting Phenomena https://escholarship.org/uc/item/24b6n91g Thu, 10 Jul 2014 00:00:00 +0000 Inada, Akihiro Ohmori, Hitoshi Min, Sangkee Dornfeld, David On impinging near-field granular jets https://escholarship.org/uc/item/1tw1t8k0 On impinging near-field granular jets https://escholarship.org/uc/item/1tw1t8k0 Thu, 10 Jul 2014 00:00:00 +0000 Arbelaez, D. Zohdi, T. I. Dornfeld, D. A. Leveraging Manufacturing for a Sustainable Future https://escholarship.org/uc/item/1cc027n6 Leveraging Manufacturing for a Sustainable Future https://escholarship.org/uc/item/1cc027n6 Thu, 10 Jul 2014 00:00:00 +0000 Dornfeld, David Burrs-Analysis, control and removal https://escholarship.org/uc/item/0zz4s5qb Burrs-Analysis, control and removal https://escholarship.org/uc/item/0zz4s5qb Thu, 10 Jul 2014 00:00:00 +0000 Aurich, J. C. Dornfeld, D. Arrazola, P. J. Franke, V. Leitz, L. Min, S. Development of a CMP Pad with Controlled Micro Features for Improved Performance https://escholarship.org/uc/item/0sc1x8mq Development of a CMP Pad with Controlled Micro Features for Improved Performance https://escholarship.org/uc/item/0sc1x8mq Thu, 10 Jul 2014 00:00:00 +0000 Lee, Sunghoon Kim, Hyoungjae Dornfeld, David "Technology Wedges" for Implementing Green Manufacturing https://escholarship.org/uc/item/0mh97659 "Technology Wedges" for Implementing Green Manufacturing https://escholarship.org/uc/item/0mh97659 Thu, 10 Jul 2014 00:00:00 +0000 Dornfeld, David Wright, Paul Geometric Approaches for Reducing Burr Formation in Planar Milling by Avoiding Tool Exits https://escholarship.org/uc/item/0gn3q1vb Geometric Approaches for Reducing Burr Formation in Planar Milling by Avoiding Tool Exits https://escholarship.org/uc/item/0gn3q1vb Thu, 10 Jul 2014 00:00:00 +0000 Dornfeld, David Chu, Chih-Hsing Greening PCB Drilling Process: Burr Minimization and Other Strategies https://escholarship.org/uc/item/09n736bv Greening PCB Drilling Process: Burr Minimization and Other Strategies https://escholarship.org/uc/item/09n736bv Thu, 10 Jul 2014 00:00:00 +0000 Huang, Yu-Chu Linke, Barbara Bhandari, Binayak Ahn, Sung-Hoon Dornfeld, David Development of a micro-drilling burr-control chart for PCB drilling https://escholarship.org/uc/item/08k854nq Development of a micro-drilling burr-control chart for PCB drilling https://escholarship.org/uc/item/08k854nq Thu, 10 Jul 2014 00:00:00 +0000 Bhandari, Binayak Hong, Young-Sun Yoon, Hae-Sung Moon, Jong-Seol Pham, Minh-Quan Lee, Gyu-Bong Huang, Yuchu Linke, Barbara S. Dornfeld, D. A. Ahn, Sung-Hoon Metrics for Sustainable Manufacturing https://escholarship.org/uc/item/06r4m8j8 Metrics for Sustainable Manufacturing https://escholarship.org/uc/item/06r4m8j8 Thu, 10 Jul 2014 00:00:00 +0000 Reich-Weiser, Corinne Vijayaraghavan, Athulan Dornfeld, David A. Modeling Gaps and Overlaps of Sustainability Standards https://escholarship.org/uc/item/0649879n Modeling Gaps and Overlaps of Sustainability Standards https://escholarship.org/uc/item/0649879n Thu, 10 Jul 2014 00:00:00 +0000 D'Alessio, Anna E. Witherell, Paul Rachuri, Sudarsan Improving endmilling surface finish by workpiece rotation and adaptive toolpath spacing https://escholarship.org/uc/item/25p8s2qb Improving endmilling surface finish by workpiece rotation and adaptive toolpath spacing https://escholarship.org/uc/item/25p8s2qb Wed, 2 Jul 2014 00:00:00 +0000 Vijayaraghavan, Athulan Hoover, Aaron M. Dornfeld, David A. Hartnett, Jeffrey Designing Imprint Rolls for Fluid Pathway Fabrication https://escholarship.org/uc/item/5rk639tt This paper discusses a novel method for designing imprint rolls for the fabrication of fluid pathways. Roller imprint processes have applications in diverse areas including fuel cell manufacturing and microfluidic device fabrication. Robust design methods are required for developing imprint rolls with optimal features. In the method discussed in this paper, the rolls are designed procedurally with the fluid pathway design given as input. The pathways are decomposed into repeating features (or tiles), and the rolls are designed by first modeling a small set of unique tiles and then combining them to model the entire roll. The tiling strategy decreases the complexity of the model, and reduces the time taken for designing the rolls. The modular nature of the tiles also improves the efficiency of post-processing operations like feature identification and optimization, and the generation of toolpaths for machining the roll. https://escholarship.org/uc/item/5rk639tt Mon, 29 Oct 2012 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David A Precision Manufacturing of Imprint Rolls for the Roller Imprinting Process https://escholarship.org/uc/item/00s0d8v2 The roller imprinting process is being developed for the efficient and accurate fabrication of microfluidic devices. As the precision of the imprinted features is dependent on the features of the imprint rolls used in the process, it is critical that the rolls are manufactured very accurately, conforming closely to their design. It is also important that imprint rolls are manufactured rapidly and cost-effectively to control the cost and lead-time of roller imprinting. This paper looks at the application of micromachining technology in the manufacturing of imprint rolls. Sources of error during the manufacturing process are identified, and their effect on the precision of the final imprinted feature is discussed. Toolpath planning strategies are presented for generating very smooth surfaces. The paper presents a framework of precision manufacturing requirements for the roller imprinting process. https://escholarship.org/uc/item/00s0d8v2 Mon, 29 Oct 2012 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David A Kim, Chang-Ju Evaluating Trade-Offs Between Sustainability, Performance, and Cost of Green Machining Technologies https://escholarship.org/uc/item/85m7t36t The growing demand to reduce environmental impacts has encouraged manufacturers to pursue various green manufacturing technologies and strategies. These solutions, though, may have a direct impact on several productivity metrics including availability, quality, service life, and cost. This study presents an approach to evaluate the trade-offs between the environmental, performance, and financial impacts of green machining technologies by combining green manufacturing principles into life cycle performance evaluation. The approach is validated by investigating the implications of reducing the processing time by increasing the cutting speed and chip load to green a horizontal milling process. https://escholarship.org/uc/item/85m7t36t Thu, 22 Mar 2012 00:00:00 +0000 Helu, Moneer Rühl, Jan Dornfeld, David Werner, Patrick Lanza, Gisela Evaluating trade-offs between sustainability, performance, and cost of green machining technologies https://escholarship.org/uc/item/4z9616zq The growing demand to reduce environmental impacts has encouraged manufacturers to pursue various green manufacturingtechnologies and strategies. These solutions, though, may have a direct impact on several productivity metricsincluding availability, quality, service life, and cost. This study presents an approach to evaluate the trade-offs betweenthe environmental, performance, and financial impacts of green machining technologies by combining green manufacturingprinciples into life cycle performance evaluation. The approach is validated by investigating the implications of reducingthe processing time by increasing the cutting speed and chip load to green a horizontal milling process. https://escholarship.org/uc/item/4z9616zq Thu, 22 Mar 2012 00:00:00 +0000 Helu, Moneer Evaluating the relationship between use phase environmental impacts and manufacturing process precision https://escholarship.org/uc/item/2s22h3pp The environmental impact of most consumer products is dominated by their use phase. However, theseimpacts tend to be driven by the manufacture of the product’s components since components fabricatedwith higher precision typically allow the product to operate at higher efficiencies. This paper investigatesthe relationship between precision and life cycle environmental impacts by extending the traditional LCAmethodology to evaluate the impact of manufacturing process precision on the functional performance ofa product during its use phase. The implications of this relationship to manufacturing decision-makingare also discussed as sustainability concerns may support the use of higher precision processes.deee https://escholarship.org/uc/item/2s22h3pp Thu, 22 Mar 2012 00:00:00 +0000 Helu, Moneer Vijayaraghavan, Athulan Dornfeld, David A model of material removal and post process surface topography for copper CMP https://escholarship.org/uc/item/2gz0f5hg <p>Increasing systemic error during copper CMP (Chemical Mechanical Planarization) is due to the uneven surfacetopography generated during the process. A mechanistic model based on a fundamental understanding of the processconstituents was proposed to predict material removal rates and the post CMP topography. Two synergisticmechanisms were proposed: 1) chemically dominant behavior is explained by the repetitive removal and formation ofa protective layer on copper surface and chemical dissolution during the process, 2) mechanically dominant removalmechanism is due to the material behavior of copper at the nano-scale and subsequent oxidation and removal of theplastically deformed copper. As a step forward to optimize the process and the manufacturing system, this model wasextended to explain pattern dependent variability during copper CMP.</p> https://escholarship.org/uc/item/2gz0f5hg Thu, 22 Mar 2012 00:00:00 +0000 Choi, Seungchoun Doyle, Fiona M. Dornfeld, David Evaluating the relationship between use phase environmental impacts and manufacturing process precision https://escholarship.org/uc/item/1q13x07z The environmental impact of most consumer products is dominated by their use phase. However, these impacts tend to be driven by the manufacture of the product’s components since components fabricated with higher precision typically allow the product to operate at higher efficiencies. This paper investigates the relationship between precision and life cycle environmental impacts by extending the traditional LCA methodology to evaluate the impact of manufacturing process precision on the functional performance of a product during its use phase. The implications of this relationship to manufacturing decision-making are also discussed as sustainability concerns may support the use of higher precision processes. https://escholarship.org/uc/item/1q13x07z Thu, 22 Mar 2012 00:00:00 +0000 Helu, Moneer Vijayaraghavan, Athulan Dornfeld, David Sustainable Manufacturing – Greening Processes, Systems and Products https://escholarship.org/uc/item/80x443hk <p>Implementing green manufacturing, as the first step towards sustainable production, has been growing in interest and importance over the last few years. The opportunities for developing advanced manufacturing capabilities while, at the same time, reducing the impact of manufacturing on energy use, water and resource consumption and, overall, green house gas emissions and carbon footprint are numerous. This paper reviews the background, vocabulary and motivation for green manufacturing and highlights the competitive opportunities for manufacturers who embrace, seriously, this growing movement. The terms "green" and "sustainable" are defined in a manufacturing context, metrics and tools for assessing manufacturing are described, and some concrete examples of how to begin and what are others doing are given. Some of the future directions of green manufacturing are discussed.</p> https://escholarship.org/uc/item/80x443hk Mon, 10 Oct 2011 00:00:00 +0000 Dornfeld, David LIFE CYCLE MANAGEMENT OF ABRASIVE TOOLS AND EFFECTS ON SUSTAINABLE GRINDING https://escholarship.org/uc/item/5th4d3q7 <p>The world-wide trend to environmental awareness is accompanied by a rising need for manufacturing technologies that spare energy and resources. The sustainability of products and processes becomes more and more a main competitive edge. However, the very essential aspect of abrasive tool design and its impact on process eco-efficiency have not been examined in a holistic view yet. Therefore this work evaluates the whole tool life from manufacturing to use phase and end-of-life.</p><p>Abrasive tools have a huge variety in specifications, manufacturing steps and ingredients Therefore a framework has to be set up to evaluate tool manufacturing with a thorough investigation of main and auxiliary ingredients emissions waste and energy Tool design affects the abrasive machining process in terms of productivity workpiece quality and tool life. Relevant mechanisms of impact are discussed, evaluated and included into a suitable holistic life cycle management of abrasive tools. Not only... https://escholarship.org/uc/item/5th4d3q7 Mon, 10 Oct 2011 00:00:00 +0000 Linke, Barbara Combination of Speed Stroke Grinding and High Speed Grinding with Regard to Sustainability https://escholarship.org/uc/item/5qs5k8pv <p>Production engineering is under constant pressure to satisfy demands for improved productivity while simultaneously achieving high workpiece quality. In addition, environmental awareness is a growing concern to address. New technologies represent new opportunities for increased productivity. This paper shows how the combination of speed stroke grinding and high speed machining can boost both process performance and workpiece quality. Theoretical consideration is validated by experiments and analyzed regarding energetic and environmental aspects. Only a thorough choice of process parameters leads to high process sustainability. Furthermore, lower tensile stresses can positively leverage increased manufacturing effort to optimize the overall product life cycle.</p> https://escholarship.org/uc/item/5qs5k8pv Mon, 10 Oct 2011 00:00:00 +0000 Linke, Barbara M. Duscha F. Klocke Dornfeld, David Energy Consumption Characterization and Reduction Strategies for Milling Machine Tool Use https://escholarship.org/uc/item/40g995w6 <p>Since machine tools are used extensively throughout their functional life and consequently consuming valuable natural resources and emitting harmful pollutants during this time, this study reviews strategies for characterizing and reducing the energy consumption of milling machine tools during their use. The power demanded by a micromachining center while cutting low carbon steel under varied material removal rates was measured to model the specific energy of the machine tool. Thereafter the power demanded was studied for cutting aluminum and polycarbonate work pieces for the purpose of comparing the difference in cutting power demand relative to that of steel.</p> https://escholarship.org/uc/item/40g995w6 Mon, 10 Oct 2011 00:00:00 +0000 Diaz, Nancy E. Redelsheimer Dornfeld, David Software-based tool path evaluation for environmental sustainability https://escholarship.org/uc/item/1387x8h9 <p>Currently available life cycle assessment (LCA) tools provide only a rough estimation of the environmental impact of different manufacturing operations (e.g. energy consumption). To address this limitation, a web-based and application programming interface (API) based process analysis software tools were developed to estimate the energy consumption of a computer numerically controlled (CNC) machine tool operation and to evaluate its environmental impact as a first step towards sustainable manufacturing analysis. Acceleration/deceleration of machine tool axes and the direction of axes movement were considered to estimate the total energy demand and processing time of the machine tool operation. Several tool path generation schemes were tested to analyze the energy consumption and resulting green house gas emission of CNC machine tool operation. It showed that tool path generation schemes affect the amount of energy and the processing time required to machine the same part, and... https://escholarship.org/uc/item/1387x8h9 Mon, 10 Oct 2011 00:00:00 +0000 KONG, DAEYOUNG Seungchoun Choi Yusuke Yasui Sushrut Pavanaskar Dornfeld, David Wright, Paul DESIGN AND FABRICATION OF A ROLLER IMPRINTING DEVICE FOR MICROFLUIDIC DEVICE MANUFACTURING https://escholarship.org/uc/item/88h5r4qw <p>Microfluidic devices are gaining popularity in a variety of applications, ranging from molecular biology to bio-defense. However, the widespread adoption of this technology is constrained by the lack of efficient and cost-effective manufacturing processes. This paper focuses on the roller imprinting process, which is being developed to rapidly and inexpensively fabricate micro-fluidic devices. In this process, a cylindrical roll with raised features on its surface creates imprints by rolling over a fixed workpiece substrate and mechanically deforming it. Roller imprinting aims to replace processes that were developed for laboratory scale prototyping which tend to not be scalable and have high equipment requirements and overheads. We discuss the limitations of PDMS soft lithography in large-scale manufacture of microfluidic devices. We also discuss the design, fabrication, and testing of a simple roller imprinting device. This imprinter has been developed based on the principles... https://escholarship.org/uc/item/88h5r4qw Thu, 20 Jan 2011 00:00:00 +0000 Vijayaraghavan, Athulan Jayanathan, Stephen Helu, Moneer Dornfeld, David Integrating Green and Sustainability Aspects into Life Cycle Performance Evaluation https://escholarship.org/uc/item/825308wk <p>Recently, an increasing number of customers of the machine tool industry have applied life cycle costing (LCC) to compare the cost-effectiveness of different investment options. These concepts have mainly been used to address maintenance costs since these have proven to be one of the most important cost drivers. The approach of life cycle performance (LCP) broadens LCC by considering the relationship between the costs and benefits of a machine over its entire life cycle. With the increasing importance of environmental consciousness, it has become crucial to incorporate environmental impact when evaluating machines. A framework is presented that enables the integration of green manufacturing principles into LCP-evaluation. The role of interoperability within this framework is also discussed.</p> https://escholarship.org/uc/item/825308wk Thu, 20 Jan 2011 00:00:00 +0000 Niggeschmidt, Stephan Helu, Moneer Diaz, Nancy Behmann, Benjamin Lanza, Gisela Dornfeld, David ADDRESSING PROCESS PLANNING AND VERIFICATION ISSUES WITH MTCONNECT https://escholarship.org/uc/item/73g339j3 <p>Robust interoperability methods are needed in manufacturing systems to implement computeraided process planning algorithms and to verify their effectiveness. In this paper we discuss applying MTConnect, an open-source standard for data exchange in manufacturing systems, in addressing two specific issues in process planning and verification. We use data from an MTConnect-compliant machine tool to estimate the cycle time required for machining complex parts in that machine. MTConnect data is also used in verifying the conformance of toolpaths to the required part features by comparing the features created by the actual tool positions to the required part features using CAD tools. We demonstrate the capabilities of MTConnect in easily enabling process planning and verification in an industrial environment.</p> https://escholarship.org/uc/item/73g339j3 Thu, 20 Jan 2011 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David Artisanal Software Remmele Engineering Inc. Machine Tool Design and Operation Strategies for Green Manufacturing https://escholarship.org/uc/item/5gz7j6rn <p>Strategies to reduce energy demand in manufacturing processes are becoming necessary due to the growing concern of carbon emissions and the expected rise of electricity prices over time. To guide the development of these strategies, the results of a life-cycle energy consumption analysis of milling machine tools are first highlighted to show the effect of several factors such as degree of automation, manufacturing environment, transportation, material inputs, and facility inputs on environmental impact. An overview of design and operation strategies to reduce energy consumption is thereafter presented including the implementation of a Kinetic Energy Recovery System (KERS), a process parameter selection strategy, and a web-based energy estimation tool.</p> https://escholarship.org/uc/item/5gz7j6rn Thu, 20 Jan 2011 00:00:00 +0000 Diaz, Nancy Choi, Seungchoun Helu, Moneer Chen, Yifen Jayanathan, Stephen Yasui, Yusuke Kong, Daeyoung Pavanaskar, Sushrut Dornfeld, David Enabling Manufacturing Research through Interoperability https://escholarship.org/uc/item/21m926m4 <p>Interoperability standards, which provide standardized communication and information exchange between machine tools and components, are necessary to bring together the many advances of the manufacturing community and fully address the challenges facing industry. Such a comprehensive approach is necessary due to the growing complexity in manufacturing and the shrinking time scale of manufacturing decision-making. In this paper we discuss the benefits of interoperability in different aspects of manufacturing research including process monitoring, CAD/CAM/CAPP, and flexible and reconfigurable manufacturing systems, as well as the advantages of interoperable systems in fulfilling the growth of sustainability and environmental requirements in manufacturing.</p> https://escholarship.org/uc/item/21m926m4 Thu, 20 Jan 2011 00:00:00 +0000 Dornfeld, David Wright, Paul Helu, Moneer Vijayaraghavan, Athulan CMP Modeling as a part of Design for Manufacturing https://escholarship.org/uc/item/1kj2b95j <p>CMP faces numerous challenges, as we move towards 45-nm and 32-nm nodes. The most important of these, as identified by ITRS [1], are: a) reliably predicting and controlling post-CMP topography (dishing and erosion loss should be limited to within 10% of the interconnect height throughout the die); b) Integration of ultra low-K</p><p>dielectric materials, including predicting stresses and damage, and designing very low stress polishing processes; and c) designing new planarization processes for new materials and new requirements.</p><p>To address these, a multi-scale (feature/die/wafer) CMP modeling framework is being developed for enabling Design for Manufacturing (DfM) and Manufacturing for Design (MfD). Topographic evolution has been studied for Shallow Trench Isolation CMP and is now being extended to copper CMP. A detailed, quantitative understanding of the mechanism(s) of CMP is being elucidated, using fundamental experiments and a mechanistic model based on physical data.... https://escholarship.org/uc/item/1kj2b95j Thu, 20 Jan 2011 00:00:00 +0000 Tripathi, Shantanu Monvoisin, Adrien Dornfeld, David Doyle, F M Strategies to reduce energy demand in manufacturing processes are becoming necessary due to the growing concern of carbon emissions and the expected rise of electricity prices over time. To guide the development of these strategies, the results of a life-cycle energy consumption analysis of milling machine tools are first highlighted to show the effect of several factors such as degree of automation, manufacturing environment, transportation, material inputs, and facility inputs on environmental impact. An overview of design and operation strategies to reduce energy consumption is thereafter presented including the implementation of a Kinetic Energy Recovery System (KERS), a process parameter selection strategy, and a web-based energy estimation tool. https://escholarship.org/uc/item/1k95m67q <p>Environmental issues in manufacturing are receiving increasing attention as part of the global concerns about environmental impacts and energy efficiency. This paper outlines a strategy using the “technology wedge” concept to address the improvement of manufacturing processes towards the goal of green manufacturing. After defining the nature of the wedges and how to assess their impact, an example of a potential wedge technology is reviewed. The wedge concept can be useful in assessing directions for new process developments in manufacturing as well as improving existing processes.</p> https://escholarship.org/uc/item/1k95m67q Thu, 20 Jan 2011 00:00:00 +0000 Dornfeld, David Wright, Paul Surface finishes from turning and facing with round nosed tools https://escholarship.org/uc/item/9mp099gw <p>The range of surface roughnesses, and particularly the minimum roughnesses, achievable mainly with cemented carbide but also with single crystal diamond round nosed turning and facing inserts, has been experimentally studied, machining aluminium on engineering and precision lathes. Insert edge sharpness and roughness measurements and characteristic variations with feed rate of machined surface profile are presented. When machine tool limits are avoided, Rz values down to 0.02 times the insert edge radii have been obtained.</p> https://escholarship.org/uc/item/9mp099gw Wed, 19 Jan 2011 00:00:00 +0000 Childs, THC Sekiya, Katsuhiko Tezuka, Ryo Yamada, Keiji Yamane, Yasuo Dornfeld, David Min, Sangkee Wright, Paul A study on initial contact detection for precision micro-mold and surface generation of vertical side walls in micromachining https://escholarship.org/uc/item/9dx0w8gz <p>The surface quality and the dimensional accuracy are important criteria for micro-mold production, specially for micro-fluidic devices. Important cutting parameters that affect the quality of vertical side walls created by the peripheral cutting edge in micro-end-milling operations were identified. Surface roughness and form error were used to define the quality of side walls on stainless steel and aluminum workpieces. An acoustic emission sensor was used to detect initial contact between a tool and a workpiece for higher dimensional accuracy where the referencing is a critical element for precision micromachining feature creation.</p> https://escholarship.org/uc/item/9dx0w8gz Wed, 19 Jan 2011 00:00:00 +0000 Min, Sangkee Sangermann, Hubertus Dornfeld, David Geometric Approaches for Reducing Burr Formation in Planar Milling by Avoiding Tool Exits https://escholarship.org/uc/item/8x62k046 <p>One of the most effective methods for reducing milling exit burrs is to prevent the tool from exiting the workpiece. Exit here refers the condition in which a cutting edge is moving out of the workpiece while removing material. Only entrance burrs can occur under this circumstance, which are usually considered burr-free. This study proposes a set of geometric algorithms for avoiding tool exits in planar milling. Two distinct approaches are developed for tool path planning of 2-D polygons. The first approach generates exit-free tool paths by offsetting the workpiece edges with appropriate widths of cut. The second one adjusts tool positions locally on given tool paths. In addition, a two-stage algorithm is designed for 2-D free-form contours. The cutter locations causing the tool to exit the workpiece are first detected; then a heuristic scheme is applied to generate new cutter locations with no tool exits. Experimental results show that edge quality is significantly improved... https://escholarship.org/uc/item/8x62k046 Wed, 19 Jan 2011 00:00:00 +0000 Chu, Chih-Hsing Dornfeld, David Subdivision Surfaces for Procedural Design of Optimal Imprint Rolls https://escholarship.org/uc/item/8d02d2dd <p>We discuss the use of subdivision surfaces in the procedural design of imprint rolls for use in the roller imprinting process. Roller imprinting is being developed for the fabrication of microfluidic devices in polymer substrates. Imprint rolls are modeled using Catmull-Clark subdivision surfaces, and are procedurally designed based on feedback from finite-element simulations of the imprinting process. Microfluidic devices exhibit repeating patterns, and can be modeled using a small set of unique entities (or tiles). Imprint rolls are also modeled as a sum of tiles, and rolls are designed by studying the imprinting behavior of clusters of tiles corresponding to the repeating patterns seen in the device. This approach reduces the roll complexity and analysis time. The rolls need to be described in a sufficiently flexible format for the tile-based analysis to be effective. Conventional model representations are too cumbersome for piecewise iterative refinement as they require... https://escholarship.org/uc/item/8d02d2dd Wed, 19 Jan 2011 00:00:00 +0000 Vijayaraghavan, Athulan Dornfeld, David Environmental Challenges for 45-nm and 32-nm node CMOS Logic https://escholarship.org/uc/item/81h91626 <p>The objective of this work is to understand the materials and energy requirements, and emissions associated with new semiconductor manufacturing technology nodes. Current and near-future CMOS technologies (for the 45-nm and 32-nm nodes) are investigated using an inventory based on bottom-up process data. The process flow of the CMOS chip is modeled by updating an existing inventory analysis (for 130 nm node devices) to include strained Si channels, metal gates, 10 layers of interconnect and high-k gate dielectrics used in 45-nm and 32-nm CMOS nodes. Conclusions are made concerning emissions of new materials and trends in life cycle energy consumption of logic devices.</p> https://escholarship.org/uc/item/81h91626 Wed, 19 Jan 2011 00:00:00 +0000 Boyd, Sarah Dornfeld, David Krishnan, Nikhil Mehran Moalem Effect of Ceria Abrasives on Planarization Efficiency in STI CMP Process https://escholarship.org/uc/item/7xx6j4s5 <p>The strong Ce-O-Si bonding between CeO2 abrasives and SiO2 film surface; i.e., the chemical tooth effect, improved planarization efficiency in CMP using ceria-based slurry as a result of nonlinear behavior of the removal rate. Removal rate is a power function of pressure and relative velocity (i.e., RR = kPαV β ). In particular, the high dependency of removal rate on pressure when α &gt;1 results in a much higher material removal rate in the upper pattern than in the lower pattern. Therefore, the planarization efficiency of ceriabased slurry is better, from initial polishing time to the completion of the polishing step, than that of conventional silica-based slurry with an exponent value of α ≈1.</p> https://escholarship.org/uc/item/7xx6j4s5 Wed, 19 Jan 2011 00:00:00 +0000 Park, Boumyoung Youngjin Kim Hyoungjae Kim Jeong, Haedo Dornfeld, David A Hybrid Life Cycle Inventory of Nano-Scale Semiconductor Manufacturing https://escholarship.org/uc/item/7931209f <p>The manufacturing of modern semiconductor devices involves a complex set of nanoscale fabrication processes that are energy and resource intensive, and generate significant waste. It is important to understand and reduce the environmental impacts of semiconductor manufacturing because these devices are ubiquitous components in electronics. Furthermore, the fabrication processes used in the semiconductor industry are finding increasing application in other products, such as microelectromechanical systems (MEMS), flat panel displays, and photovoltaics. In this work we develop a library of typical gate-to-gate materials and energy requirements, as well as emissions associated with a complete set of fabrication processmodelsusedinmanufacturingamodernmicroprocessor. In addition, we evaluate upstream energy requirements associated with chemicals and materials using both existing process life cycle assessment (LCA) databases and an economic input-output (EIO) model. The result is... https://escholarship.org/uc/item/7931209f Wed, 19 Jan 2011 00:00:00 +0000 Krishnan, Nikhil Boyd, Sarah Somani, Ajay Dornfeld, David